與傳(chuan)統(tong)真(zhen)空(kong)(kong)(kong)(kong)(kong)設備(bei)相比,水(shui)(shui)環(huan)真(zhen)空(kong)(kong)(kong)(kong)(kong)機(ji)(ji)組(zu)(zu)在晶(jing)圓(yuan)(yuan)吸(xi)(xi)(xi)(xi)附(fu)切(qie)割(ge)(ge)(ge)技術,通過(guo)精(jing)確控制(zhi)切(qie)割(ge)(ge)(ge)工具(ju)與晶(jing)圓(yuan)(yuan)表面的(de)(de)(de)(de)接觸力(li)度(du)與角度(du),結(jie)合高效(xiao)的(de)(de)(de)(de)真(zhen)空(kong)(kong)(kong)(kong)(kong)吸(xi)(xi)(xi)(xi)附(fu)系統(tong),實現了對晶(jing)圓(yuan)(yuan)的(de)(de)(de)(de)高效(xiao)、精(jing)準切(qie)割(ge)(ge)(ge)。這(zhe)一過(guo)程中,晶(jing)圓(yuan)(yuan)吸(xi)(xi)(xi)(xi)附(fu)切(qie)割(ge)(ge)(ge)水(shui)(shui)環(huan)真(zhen)空(kong)(kong)(kong)(kong)(kong)機(ji)(ji)組(zu)(zu)作為核(he)心設備(bei),發揮了至(zhi)關重要的(de)(de)(de)(de)作用(yong)。真(zhen)空(kong)(kong)(kong)(kong)(kong)度(du)穩(wen)定(ding)(ding):水(shui)(shui)環(huan)真(zhen)空(kong)(kong)(kong)(kong)(kong)機(ji)(ji)組(zu)(zu)提供穩(wen)定(ding)(ding)的(de)(de)(de)(de)真(zhen)空(kong)(kong)(kong)(kong)(kong)環(huan)境,確保(bao)(bao)晶(jing)圓(yuan)(yuan)在切(qie)割(ge)(ge)(ge)過(guo)程中能(neng)(neng)夠(gou)牢固地吸(xi)(xi)(xi)(xi)附(fu)在切(qie)割(ge)(ge)(ge)平臺上,避免(mian)因振動或(huo)外力(li)干擾導(dao)致(zhi)的(de)(de)(de)(de)切(qie)割(ge)(ge)(ge)偏差或(huo)損壞。水(shui)(shui)環(huan)真(zhen)空(kong)(kong)(kong)(kong)(kong)機(ji)(ji)組(zu)(zu)還具(ju)備(bei)良好的(de)(de)(de)(de)密封性(xing)(xing)(xing)和(he)(he)耐腐蝕性(xing)(xing)(xing),能(neng)(neng)夠(gou)有效(xiao)防止塵(chen)埃、雜質(zhi)(zhi)等(deng)(deng)污染(ran)物進入切(qie)割(ge)(ge)(ge)區(qu)域(yu),保(bao)(bao)證晶(jing)圓(yuan)(yuan)切(qie)割(ge)(ge)(ge)的(de)(de)(de)(de)潔凈度(du)和(he)(he)精(jing)度(du)。其結(jie)構(gou)簡單、運(yun)行(xing)穩(wen)定(ding)(ding),維護(hu)成(cheng)本(ben)低廉水(shui)(shui)作為工作介質(zhi)(zhi),環(huan)保(bao)(bao)無污染(ran)水(shui)(shui)環(huan)真(zhen)空(kong)(kong)(kong)(kong)(kong)機(ji)(ji)組(zu)(zu)具(ju)有較寬(kuan)的(de)(de)(de)(de)抽氣(qi)(qi)范(fan)圍和(he)(he)較強的(de)(de)(de)(de)抽氣(qi)(qi)能(neng)(neng)力(li),能(neng)(neng)夠(gou)滿足(zu)不(bu)同(tong)規(gui)格、不(bu)同(tong)材質(zhi)(zhi)的(de)(de)(de)(de)晶(jing)圓(yuan)(yuan)切(qie)割(ge)(ge)(ge)需求。在實際應用(yong)中,晶(jing)圓(yuan)(yuan)吸(xi)(xi)(xi)(xi)附(fu)切(qie)割(ge)(ge)(ge)水(shui)(shui)環(huan)真(zhen)空(kong)(kong)(kong)(kong)(kong)機(ji)(ji)組(zu)(zu)已廣泛應用(yong)于集成(cheng)電(dian)(dian)路、微電(dian)(dian)子、光電(dian)(dian)子等(deng)(deng)領(ling)域(yu)的(de)(de)(de)(de)晶(jing)圓(yuan)(yuan)切(qie)割(ge)(ge)(ge)工藝中。例如,在先進制(zhi)程的(de)(de)(de)(de)CPU、GPU等(deng)(deng)高性(xing)(xing)(xing)能(neng)(neng)芯(xin)片的(de)(de)(de)(de)制(zhi)造過(guo)程中,晶(jing)圓(yuan)(yuan)吸(xi)(xi)(xi)(xi)附(fu)切(qie)割(ge)(ge)(ge)水(shui)(shui)環(huan)真(zhen)空(kong)(kong)(kong)(kong)(kong)機(ji)(ji)組(zu)(zu)以(yi)其卓越的(de)(de)(de)(de)真(zhen)空(kong)(kong)(kong)(kong)(kong)性(xing)(xing)(xing)能(neng)(neng)和(he)(he)穩(wen)定(ding)(ding)性(xing)(xing)(xing),確保(bao)(bao)了芯(xin)片切(qie)割(ge)(ge)(ge)的(de)(de)(de)(de)精(jing)度(du)和(he)(he)成(cheng)品(pin)率,為產品(pin)的(de)(de)(de)(de)高性(xing)(xing)(xing)能(neng)(neng)和(he)(he)低成(cheng)本(ben)生產提供了有力(li)保(bao)(bao)障。
發(fa)布時間(jian):
2024
-
09
-
05