真(zhen)(zhen)(zhen)空泵機組(zu)(zu)(zu)通常(chang)由以下部件(jian)組(zu)(zu)(zu)成(cheng):各(ge)種真(zhen)(zhen)(zhen)空泵;真(zhen)(zhen)(zhen)空測量機組(zu)(zu)(zu);真(zhen)(zhen)(zhen)空閥;真(zhen)(zhen)(zhen)空管和一些其(qi)他組(zu)(zu)(zu)件(jian),如鼓(gu)風機,真(zhen)(zhen)(zhen)空接頭,儲氣罐,波紋管,集(ji)塵器和真(zhen)(zhen)(zhen)空繼(ji)電器。
根據機組的工作壓力,有粗真空泵機組(> 1330Pa);低真空泵機組(1330~0.13Pa);高真空泵機組(0.13~1.3×10-6 Pa);超高真空泵機組(1.3×10-6)~1.3×10-11 Pa);非常高的真空泵機組(<1.2×10-11 Pa)。
用于(yu)高(gao)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)的羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(機械增壓(ya)泵(beng)(beng)(beng)(beng)(beng))不能直接排(pai)放到(dao)大氣中(zhong)(zhong)。例(li)如,直排(pai)氣氛將導致(zhi)羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)的入口和(he)排(pai)氣口之間(jian)(jian)的壓(ya)力(li)差太(tai)大,從而(er)使羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)過載。增加(jia)羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)電機的功率將導致(zhi)羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)過熱,因(yin)此羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)轉(zhuan)子(zi)(zi)之間(jian)(jian)的小間(jian)(jian)隙會因(yin)熱膨脹而(er)迅(xun)速卡住(zhu)。為(wei)了確保(bao)羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)能夠實現更高(gao)的真(zhen)(zhen)(zhen)空(kong)(kong)(kong)度,必須確保(bao)羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)轉(zhuan)子(zi)(zi)之間(jian)(jian)的間(jian)(jian)隙。因(yin)此,羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)必須配備前(qian)級(ji)泵(beng)(beng)(beng)(beng)(beng),當系統中(zhong)(zhong)的壓(ya)力(li)通過前(qian)級(ji)泵(beng)(beng)(beng)(beng)(beng)泵(beng)(beng)(beng)(beng)(beng)送到(dao)一定范圍時,羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)啟動,這(zhe)樣可(ke)以防止羅(luo)(luo)(luo)茨(ci)(ci)(ci)(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)過載。前(qian)級(ji)泵(beng)(beng)(beng)(beng)(beng)可(ke)以是(shi)可(ke)以直接排(pai)放到(dao)大氣中(zhong)(zhong)的真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng),例(li)如水(液體)環真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng),旋片真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng),滑閥真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)或往復式真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)。
羅茨真(zhen)(zhen)(zhen)空(kong)泵(beng)(beng)機組在正常(chang)情(qing)況下,使(shi)用(yong)(yong)水環(huan)泵(beng)(beng)作(zuo)為前級泵(beng)(beng)比其(qi)他(ta)真(zhen)(zhen)(zhen)空(kong)泵(beng)(beng)更有(you)優勢,主要是因為它(ta)可以(yi)去(qu)除大量(liang)的(de)可冷凝蒸汽(qi),特別是當氣(qi)鎮機械真(zhen)(zhen)(zhen)空(kong)泵(beng)(beng)消除冷凝時(shi)。有(you)性(xing)蒸汽(qi)容量(liang)不(bu)足,或者(zhe)使(shi)用(yong)(yong)的(de)溶劑會使(shi)泵(beng)(beng)油(you)劣(lie)化并影響(xiang)性(xing)能,或者(zhe)當真(zhen)(zhen)(zhen)空(kong)系統(tong)不(bu)允許油(you)污染時(shi)更明顯。
低(di)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)機組(zu)的(de)(de)(de)(de)主(zhu)要特點(dian)是工(gong)作壓(ya)力大,排量(liang)大,但(dan)泵(beng)(beng)(beng)送(song)速度低(di)于(yu)高真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)機組(zu)。它廣泛(fan)用(yong)(yong)于(yu)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)送(song)和真(zhen)(zhen)(zhen)空(kong)(kong)(kong)吸(xi)塵,真(zhen)(zhen)(zhen)空(kong)(kong)(kong)浸漬,真(zhen)(zhen)(zhen)空(kong)(kong)(kong)吸(xi)塵,真(zhen)(zhen)(zhen)空(kong)(kong)(kong)脫氣,真(zhen)(zhen)(zhen)空(kong)(kong)(kong)干燥等設(she)備。低(di)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)機組(zu)的(de)(de)(de)(de)主(zhu)泵(beng)(beng)(beng)是常用(yong)(yong)的(de)(de)(de)(de)往復式真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng),油(you)(you)封真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng),水射(she)流泵(beng)(beng)(beng),水蒸汽噴(pen)射(she)泵(beng)(beng)(beng),水環(huan)泵(beng)(beng)(beng),油(you)(you)蒸汽噴(pen)射(she)泵(beng)(beng)(beng),分子(zi)篩(shai)吸(xi)附泵(beng)(beng)(beng)和羅茨泵(beng)(beng)(beng)。當使用(yong)(yong)低(di)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)泵(beng)(beng)(beng)機組(zu)時,還必須(xu)根據泵(beng)(beng)(beng)送(song)氣體的(de)(de)(de)(de)清潔(jie)度和濕度的(de)(de)(de)(de)工(gong)藝要求配置諸如集(ji)塵器和干式過濾器的(de)(de)(de)(de)部件。
高真(zhen)(zhen)空泵(beng)機組(zu)如JZJX,JZJP型羅茨(ci)旋片式(shi)真(zhen)(zhen)空泵(beng)機組(zu)。
1選擇(ze)主(zhu)泵(beng),主(zhu)泵(beng)有擴散泵(beng),分(fen)子泵(beng),濺射離(li)子泵(beng),鈦泵(beng),低(di)溫泵(beng)等。
2選擇預(yu)抽泵和儲氣管(防(fang)震(zhen),縮短工作循(xun)環,防(fang)止真空(kong)室內大量(liang)通(tong)風,并穩(wen)定擴散(san)泵的出口壓力)
超高真(zhen)空泵機組
主泵(beng)具有極(ji)高的(de)真空度,低(di)泄漏率,并且在200至450°C的(de)溫度下耐(nai)烘烤。
1擴散泵(beng)機(ji)組:減(jian)少回(hui)流和(he)控制污染;
2分子泵機組(zu):氫(qing)壓縮比小(xiao),殘余氣體主(zhu)要(yao)為(wei)氫(qing)氣;
3濺射(she)離子泵機組:通(tong)常與鈦泵配合使用(yong);
4低溫(wen)泵機組(zu):無污染。
由于超高真空泵機組的高成本,裝配結構更加嚴格,現在正由羅茨旋片式真空泵機組取代。但是,在極其嚴格的工作環境要求下,還有另一個量化需求。