2021
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01
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14
干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)主要在(zai)半(ban)導體行(xing)業(ye)、化(hua)學工(gong)業(ye)、薄(bo)膜產(chan)(chan)業(ye)得到應用(yong)(yong)(yong)與發(fa)展。國外(wai)的(de)(de)(de)干(gan)泵(beng)(beng)(beng)(beng)市場(chang)正處于(yu)蒸蒸日上(shang)的(de)(de)(de)階段,如日本,半(ban)導體行(xing)業(ye)已全(quan)部用(yong)(yong)(yong)干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)代替油(you)(you)封式(shi)(shi)(shi)(shi)(shi)機械泵(beng)(beng)(beng)(beng),而(er)歐(ou)美(mei)半(ban)導體行(xing)業(ye)45%以上(shang)用(yong)(yong)(yong)干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)代替了油(you)(you)封式(shi)(shi)(shi)(shi)(shi)機械泵(beng)(beng)(beng)(beng),大(da)大(da)提高(gao)了產(chan)(chan)品的(de)(de)(de)性(xing)能(neng)(neng)和(he)質量(liang)(liang)。 為(wei)了滿足不同應用(yong)(yong)(yong)領域和(he)不同工(gong)況的(de)(de)(de)要求,國外(wai)有(you)螺(luo)桿(gan)(gan)(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)、多(duo)級(ji)羅茨真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)、多(duo)級(ji)爪式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)、往復式(shi)(shi)(shi)(shi)(shi)活塞(sai)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)、渦(wo)旋式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)以及渦(wo)輪(lun)式(shi)(shi)(shi)(shi)(shi)無油(you)(you)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)等。干(gan)泵(beng)(beng)(beng)(beng)極限(xian)壓(ya)力從(cong)10Pa~10-2Pa,抽(chou)(chou)速從(cong)20m3/h~500m3/h。 1、干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)的(de)(de)(de)介紹及原(yuan)(yuan)理(li) 此(ci)為(wei)立式(shi)(shi)(shi)(shi)(shi)雙螺(luo)桿(gan)(gan)(gan)干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng),它的(de)(de)(de)吸(xi)氣(qi)(qi)和(he)排(pai)(pai)氣(qi)(qi)原(yuan)(yuan)理(li)和(he)大(da)多(duo)數是(shi)一樣的(de)(de)(de),是(shi)利用(yong)(yong)(yong)一對螺(luo)桿(gan)(gan)(gan),在(zai)泵(beng)(beng)(beng)(beng)殼中作(zuo)同步(bu)高(gao)速反向旋轉(zhuan)(zhuan)而(er)產(chan)(chan)生的(de)(de)(de)吸(xi)氣(qi)(qi)和(he)排(pai)(pai)氣(qi)(qi)作(zuo)用(yong)(yong)(yong)的(de)(de)(de)抽(chou)(chou)氣(qi)(qi)設備。 干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)工(gong)作(zuo)時,相互之(zhi)間(jian)無摩擦,運轉(zhuan)(zhuan)平穩,噪(zao)音低(di)(di),工(gong)作(zuo)腔(qiang)無需潤滑油(you)(you),因此(ci),干(gan)式(shi)(shi)(shi)(shi)(shi)螺(luo)桿(gan)(gan)(gan)泵(beng)(beng)(beng)(beng)能(neng)(neng)抽(chou)(chou)除含(han)有(you)大(da)量(liang)(liang)水蒸汽(qi)及少量(liang)(liang)粉塵。由于(yu)螺(luo)桿(gan)(gan)(gan)制(zhi)成變螺(luo)距結構(gou),與等螺(luo)距結構(gou)相比,極限(xian)真(zhen)(zhen)空(kong)更(geng)高(gao),而(er)消(xiao)耗(hao)功率更(geng)低(di)(di),具有(you)節能(neng)(neng),免(mian)維(wei)修等優點。它是(shi)油(you)(you)封式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)空(kong)泵(beng)(beng)(beng)(beng)的(de)(de)(de)更(geng)新換代產(chan)(chan)品。 備品備件(jian)是(shi)標準的(de)(de)(de)O型圈。從(cong)上(shang)至下的(de)(de)(de)輸送(song)方式(shi)(shi)(shi)(shi)(shi)能(neng)(neng)可靠地處理(li)夾帶液體的(de)(de)(de)濕氣(qi)(qi)及粉塵,并(bing)且無需過濾(lv)器。最優化(hua)的(de)(de)(de)螺(luo)桿(gan)(gan)(gan)外(wai)形設計使功率消(xiao)耗(hao)降到最低(di)(di),簡(jian)單的(de)(de)(de)設計可使泵(beng)(beng)(beng)(beng)腔(qiang)在(zai)1小時內在(zai)現(xian)場(chang)全(quan)部解體,易于(yu)清洗維(wei)護。 2、獨特的(de)(de)(de)冷卻方式(shi)(shi)(shi)(shi)(shi) 很多(duo)泵(beng)(beng)(beng)(beng)轉(zhuan)(zhuan)子(zi)卡死的(de)(de)(de)原(yuan)(yuan)因是(shi)吸(xi)入(ru)含(han)有(you)粉塵及結晶(jing)的(de)(de)(de)物(wu)質、高(gao)溫發(fa)生聚合的(de)(de)(de)物(wu)質、熱(re)敏(min)性(xing)物(wu)質的(de)(de)(de)升華造成轉(zhuan)(zhuan)子(zi)間(jian)的(de)(de)(de)間(jian)...