2021
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01
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14
干式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)主要在(zai)半導(dao)體行(xing)業、化學工(gong)(gong)業、薄膜產(chan)業得到應(ying)用與(yu)發(fa)展。國外的(de)(de)(de)干泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)市場(chang)正(zheng)處于(yu)(yu)蒸蒸日上(shang)的(de)(de)(de)階段,如日本,半導(dao)體行(xing)業已全部(bu)用干式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)代(dai)替油(you)封(feng)式(shi)(shi)(shi)機(ji)械泵(beng)(beng)(beng)(beng)(beng)(beng)(beng),而(er)歐美半導(dao)體行(xing)業45%以上(shang)用干式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)代(dai)替了油(you)封(feng)式(shi)(shi)(shi)機(ji)械泵(beng)(beng)(beng)(beng)(beng)(beng)(beng),大(da)大(da)提高(gao)了產(chan)品的(de)(de)(de)性(xing)能(neng)和(he)(he)質(zhi)(zhi)量(liang)。 為了滿足不(bu)同應(ying)用領域和(he)(he)不(bu)同工(gong)(gong)況的(de)(de)(de)要求,國外有(you)螺(luo)(luo)桿(gan)(gan)式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)、多(duo)級羅茨真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)、多(duo)級爪式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)、往復式(shi)(shi)(shi)活塞真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)、渦旋式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)以及(ji)(ji)(ji)渦輪式(shi)(shi)(shi)無(wu)油(you)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)等。干泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)極限壓力從(cong)10Pa~10-2Pa,抽速從(cong)20m3/h~500m3/h。 1、干式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)的(de)(de)(de)介紹(shao)及(ji)(ji)(ji)原理 此(ci)(ci)為立式(shi)(shi)(shi)雙螺(luo)(luo)桿(gan)(gan)干式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng),它(ta)的(de)(de)(de)吸(xi)氣(qi)和(he)(he)排(pai)氣(qi)原理和(he)(he)大(da)多(duo)數是一(yi)樣的(de)(de)(de),是利(li)用一(yi)對螺(luo)(luo)桿(gan)(gan),在(zai)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)殼(ke)中作(zuo)(zuo)同步(bu)高(gao)速反向旋轉而(er)產(chan)生的(de)(de)(de)吸(xi)氣(qi)和(he)(he)排(pai)氣(qi)作(zuo)(zuo)用的(de)(de)(de)抽氣(qi)設(she)備。 干式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)工(gong)(gong)作(zuo)(zuo)時,相互之間(jian)無(wu)摩擦,運(yun)轉平穩,噪(zao)音低(di),工(gong)(gong)作(zuo)(zuo)腔無(wu)需潤滑油(you),因此(ci)(ci),干式(shi)(shi)(shi)螺(luo)(luo)桿(gan)(gan)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)能(neng)抽除含(han)(han)有(you)大(da)量(liang)水蒸汽及(ji)(ji)(ji)少(shao)量(liang)粉(fen)塵(chen)。由于(yu)(yu)螺(luo)(luo)桿(gan)(gan)制成變螺(luo)(luo)距結(jie)構(gou),與(yu)等螺(luo)(luo)距結(jie)構(gou)相比,極限真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)更高(gao),而(er)消耗功率更低(di),具有(you)節(jie)能(neng),免維(wei)修等優(you)點。它(ta)是油(you)封(feng)式(shi)(shi)(shi)真(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)的(de)(de)(de)更新換(huan)代(dai)產(chan)品。 備品備件是標準的(de)(de)(de)O型圈(quan)。從(cong)上(shang)至下的(de)(de)(de)輸送方(fang)式(shi)(shi)(shi)能(neng)可(ke)(ke)靠地處理夾(jia)帶液(ye)體的(de)(de)(de)濕氣(qi)及(ji)(ji)(ji)粉(fen)塵(chen),并且無(wu)需過濾器。最優(you)化的(de)(de)(de)螺(luo)(luo)桿(gan)(gan)外形設(she)計(ji)使功率消耗降到最低(di),簡單的(de)(de)(de)設(she)計(ji)可(ke)(ke)使泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)腔在(zai)1小時內在(zai)現場(chang)全部(bu)解體,易(yi)于(yu)(yu)清洗(xi)維(wei)護。 2、獨特的(de)(de)(de)冷卻方(fang)式(shi)(shi)(shi) 很多(duo)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)轉子(zi)卡死的(de)(de)(de)原因是吸(xi)入(ru)含(han)(han)有(you)粉(fen)塵(chen)及(ji)(ji)(ji)結(jie)晶的(de)(de)(de)物質(zhi)(zhi)、高(gao)溫發(fa)生聚合的(de)(de)(de)物質(zhi)(zhi)、熱(re)敏性(xing)物質(zhi)(zhi)的(de)(de)(de)升華(hua)造(zao)成轉子(zi)間(jian)的(de)(de)(de)間(jian)...