2021
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01
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14
干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)主要(yao)在(zai)(zai)半(ban)導體(ti)(ti)行(xing)(xing)業(ye)、化學工(gong)(gong)業(ye)、薄膜產(chan)業(ye)得到應用與發展。國外的(de)(de)(de)干(gan)泵(beng)(beng)(beng)(beng)(beng)(beng)市場正(zheng)處于(yu)(yu)蒸蒸日(ri)上(shang)的(de)(de)(de)階(jie)段(duan),如日(ri)本,半(ban)導體(ti)(ti)行(xing)(xing)業(ye)已(yi)全部用干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)代替油(you)封(feng)式(shi)(shi)(shi)(shi)(shi)機械(xie)泵(beng)(beng)(beng)(beng)(beng)(beng),而歐美半(ban)導體(ti)(ti)行(xing)(xing)業(ye)45%以上(shang)用干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)代替了油(you)封(feng)式(shi)(shi)(shi)(shi)(shi)機械(xie)泵(beng)(beng)(beng)(beng)(beng)(beng),大(da)大(da)提高了產(chan)品的(de)(de)(de)性能和質(zhi)量。 為了滿足不同(tong)應用領(ling)域和不同(tong)工(gong)(gong)況(kuang)的(de)(de)(de)要(yao)求,國外有(you)螺(luo)桿式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)、多(duo)(duo)級羅茨(ci)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)、多(duo)(duo)級爪式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)、往復式(shi)(shi)(shi)(shi)(shi)活塞真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)、渦旋式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)以及(ji)(ji)(ji)渦輪式(shi)(shi)(shi)(shi)(shi)無(wu)油(you)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)等(deng)。干(gan)泵(beng)(beng)(beng)(beng)(beng)(beng)極(ji)限壓力從(cong)10Pa~10-2Pa,抽速(su)從(cong)20m3/h~500m3/h。 1、干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)的(de)(de)(de)介(jie)紹及(ji)(ji)(ji)原(yuan)理 此為立式(shi)(shi)(shi)(shi)(shi)雙螺(luo)桿干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng),它(ta)的(de)(de)(de)吸氣和排(pai)氣原(yuan)理和大(da)多(duo)(duo)數是一樣的(de)(de)(de),是利(li)用一對螺(luo)桿,在(zai)(zai)泵(beng)(beng)(beng)(beng)(beng)(beng)殼中作(zuo)(zuo)同(tong)步(bu)高速(su)反向旋轉而產(chan)生的(de)(de)(de)吸氣和排(pai)氣作(zuo)(zuo)用的(de)(de)(de)抽氣設(she)(she)備。 干(gan)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)工(gong)(gong)作(zuo)(zuo)時,相互之間無(wu)摩擦,運(yun)轉平穩(wen),噪(zao)音(yin)低(di),工(gong)(gong)作(zuo)(zuo)腔(qiang)無(wu)需(xu)潤滑油(you),因此,干(gan)式(shi)(shi)(shi)(shi)(shi)螺(luo)桿泵(beng)(beng)(beng)(beng)(beng)(beng)能抽除(chu)含(han)有(you)大(da)量水蒸汽及(ji)(ji)(ji)少量粉(fen)塵。由于(yu)(yu)螺(luo)桿制成變螺(luo)距(ju)結(jie)構,與等(deng)螺(luo)距(ju)結(jie)構相比,極(ji)限真(zhen)(zhen)(zhen)空(kong)(kong)更(geng)(geng)高,而消耗功(gong)率更(geng)(geng)低(di),具(ju)有(you)節能,免維修等(deng)優(you)點。它(ta)是油(you)封(feng)式(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)的(de)(de)(de)更(geng)(geng)新換代產(chan)品。 備品備件是標(biao)準的(de)(de)(de)O型(xing)圈(quan)。從(cong)上(shang)至下的(de)(de)(de)輸送(song)方式(shi)(shi)(shi)(shi)(shi)能可靠地處理夾(jia)帶(dai)液(ye)體(ti)(ti)的(de)(de)(de)濕氣及(ji)(ji)(ji)粉(fen)塵,并且無(wu)需(xu)過濾器。最優(you)化的(de)(de)(de)螺(luo)桿外形設(she)(she)計使功(gong)率消耗降到最低(di),簡(jian)單的(de)(de)(de)設(she)(she)計可使泵(beng)(beng)(beng)(beng)(beng)(beng)腔(qiang)在(zai)(zai)1小時內(nei)在(zai)(zai)現場全部解體(ti)(ti),易于(yu)(yu)清(qing)洗維護。 2、獨特的(de)(de)(de)冷卻方式(shi)(shi)(shi)(shi)(shi) 很多(duo)(duo)泵(beng)(beng)(beng)(beng)(beng)(beng)轉子卡死(si)的(de)(de)(de)原(yuan)因是吸入含(han)有(you)粉(fen)塵及(ji)(ji)(ji)結(jie)晶的(de)(de)(de)物(wu)質(zhi)、高溫(wen)發生聚(ju)合的(de)(de)(de)物(wu)質(zhi)、熱敏性物(wu)質(zhi)的(de)(de)(de)升華(hua)造成轉子間的(de)(de)(de)間...