2021
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01
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14
干(gan)(gan)式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)主要在半(ban)導(dao)體(ti)行(xing)業、化學工(gong)業、薄膜(mo)產(chan)業得(de)到應(ying)(ying)用(yong)與發(fa)展。國外(wai)的(de)(de)干(gan)(gan)泵(beng)(beng)(beng)(beng)市場(chang)正處(chu)于蒸(zheng)蒸(zheng)日上(shang)的(de)(de)階段,如日本,半(ban)導(dao)體(ti)行(xing)業已(yi)全(quan)部(bu)用(yong)干(gan)(gan)式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)代替油(you)封式(shi)(shi)(shi)(shi)(shi)(shi)機(ji)械泵(beng)(beng)(beng)(beng),而(er)歐美半(ban)導(dao)體(ti)行(xing)業45%以上(shang)用(yong)干(gan)(gan)式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)代替了油(you)封式(shi)(shi)(shi)(shi)(shi)(shi)機(ji)械泵(beng)(beng)(beng)(beng),大大提高(gao)了產(chan)品的(de)(de)性能和(he)質量。 為了滿足(zu)不同應(ying)(ying)用(yong)領域和(he)不同工(gong)況的(de)(de)要求,國外(wai)有(you)螺(luo)桿(gan)式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)、多(duo)(duo)級羅茨(ci)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)、多(duo)(duo)級爪式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)、往復(fu)式(shi)(shi)(shi)(shi)(shi)(shi)活塞真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)、渦旋式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)以及(ji)(ji)渦輪式(shi)(shi)(shi)(shi)(shi)(shi)無(wu)油(you)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)等。干(gan)(gan)泵(beng)(beng)(beng)(beng)極限壓力從(cong)10Pa~10-2Pa,抽速(su)從(cong)20m3/h~500m3/h。 1、干(gan)(gan)式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)的(de)(de)介紹(shao)及(ji)(ji)原理(li) 此為立式(shi)(shi)(shi)(shi)(shi)(shi)雙螺(luo)桿(gan)干(gan)(gan)式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng),它(ta)的(de)(de)吸(xi)氣(qi)和(he)排氣(qi)原理(li)和(he)大多(duo)(duo)數是一(yi)樣的(de)(de),是利用(yong)一(yi)對螺(luo)桿(gan),在泵(beng)(beng)(beng)(beng)殼中作(zuo)同步高(gao)速(su)反向旋轉(zhuan)而(er)產(chan)生(sheng)的(de)(de)吸(xi)氣(qi)和(he)排氣(qi)作(zuo)用(yong)的(de)(de)抽氣(qi)設備。 干(gan)(gan)式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)工(gong)作(zuo)時,相(xiang)(xiang)互(hu)之間(jian)無(wu)摩擦,運轉(zhuan)平穩,噪音低(di),工(gong)作(zuo)腔(qiang)無(wu)需潤滑油(you),因此,干(gan)(gan)式(shi)(shi)(shi)(shi)(shi)(shi)螺(luo)桿(gan)泵(beng)(beng)(beng)(beng)能抽除含有(you)大量水蒸(zheng)汽(qi)及(ji)(ji)少量粉塵。由于螺(luo)桿(gan)制成(cheng)變螺(luo)距(ju)結構(gou),與等螺(luo)距(ju)結構(gou)相(xiang)(xiang)比,極限真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)更高(gao),而(er)消耗功(gong)率更低(di),具(ju)有(you)節(jie)能,免維修等優(you)點。它(ta)是油(you)封式(shi)(shi)(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)的(de)(de)更新(xin)換代產(chan)品。 備品備件是標準的(de)(de)O型圈。從(cong)上(shang)至下(xia)的(de)(de)輸送方式(shi)(shi)(shi)(shi)(shi)(shi)能可靠地(di)處(chu)理(li)夾帶液體(ti)的(de)(de)濕氣(qi)及(ji)(ji)粉塵,并且無(wu)需過濾器(qi)。最(zui)優(you)化的(de)(de)螺(luo)桿(gan)外(wai)形設計使(shi)功(gong)率消耗降到最(zui)低(di),簡單(dan)的(de)(de)設計可使(shi)泵(beng)(beng)(beng)(beng)腔(qiang)在1小時內在現場(chang)全(quan)部(bu)解體(ti),易于清洗維護(hu)。 2、獨特(te)的(de)(de)冷卻方式(shi)(shi)(shi)(shi)(shi)(shi) 很(hen)多(duo)(duo)泵(beng)(beng)(beng)(beng)轉(zhuan)子卡死的(de)(de)原因是吸(xi)入含有(you)粉塵及(ji)(ji)結晶的(de)(de)物(wu)質、高(gao)溫發(fa)生(sheng)聚合的(de)(de)物(wu)質、熱(re)敏性物(wu)質的(de)(de)升華(hua)造成(cheng)轉(zhuan)子間(jian)的(de)(de)間(jian)...