2021
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01
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14
干(gan)(gan)式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)主要(yao)在(zai)半導(dao)體(ti)行業、化(hua)學工(gong)業、薄膜產(chan)業得到(dao)應用(yong)與發(fa)展。國(guo)外的(de)(de)(de)干(gan)(gan)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)市(shi)場正處(chu)于(yu)蒸蒸日(ri)(ri)上的(de)(de)(de)階段(duan),如日(ri)(ri)本,半導(dao)體(ti)行業已全部(bu)用(yong)干(gan)(gan)式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)代替油封式(shi)(shi)(shi)(shi)機械泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng),而歐美半導(dao)體(ti)行業45%以(yi)(yi)上用(yong)干(gan)(gan)式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)代替了油封式(shi)(shi)(shi)(shi)機械泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng),大(da)(da)(da)大(da)(da)(da)提高(gao)了產(chan)品的(de)(de)(de)性能(neng)和質量(liang)。 為了滿(man)足(zu)不(bu)同(tong)應用(yong)領域和不(bu)同(tong)工(gong)況(kuang)的(de)(de)(de)要(yao)求,國(guo)外有螺(luo)桿(gan)(gan)(gan)(gan)式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)、多(duo)級(ji)羅茨真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)、多(duo)級(ji)爪式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)、往復式(shi)(shi)(shi)(shi)活塞真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)、渦旋式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)以(yi)(yi)及渦輪式(shi)(shi)(shi)(shi)無(wu)油真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)等。干(gan)(gan)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)極限(xian)(xian)壓力從10Pa~10-2Pa,抽速從20m3/h~500m3/h。 1、干(gan)(gan)式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)的(de)(de)(de)介紹(shao)及原理 此為立式(shi)(shi)(shi)(shi)雙螺(luo)桿(gan)(gan)(gan)(gan)干(gan)(gan)式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng),它(ta)的(de)(de)(de)吸(xi)氣(qi)和排氣(qi)原理和大(da)(da)(da)多(duo)數是(shi)一樣的(de)(de)(de),是(shi)利用(yong)一對螺(luo)桿(gan)(gan)(gan)(gan),在(zai)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)殼中作同(tong)步(bu)高(gao)速反向旋轉而產(chan)生的(de)(de)(de)吸(xi)氣(qi)和排氣(qi)作用(yong)的(de)(de)(de)抽氣(qi)設(she)備(bei)(bei)。 干(gan)(gan)式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)工(gong)作時(shi),相(xiang)互之間(jian)無(wu)摩擦,運轉平穩,噪音低(di)(di),工(gong)作腔無(wu)需(xu)潤滑(hua)油,因此,干(gan)(gan)式(shi)(shi)(shi)(shi)螺(luo)桿(gan)(gan)(gan)(gan)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)能(neng)抽除含有大(da)(da)(da)量(liang)水蒸汽及少量(liang)粉(fen)塵。由于(yu)螺(luo)桿(gan)(gan)(gan)(gan)制成(cheng)變(bian)螺(luo)距結(jie)構,與等螺(luo)距結(jie)構相(xiang)比,極限(xian)(xian)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)更(geng)(geng)高(gao),而消(xiao)耗功率(lv)更(geng)(geng)低(di)(di),具有節(jie)能(neng),免維修等優(you)點。它(ta)是(shi)油封式(shi)(shi)(shi)(shi)真(zhen)(zhen)(zhen)(zhen)空(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)的(de)(de)(de)更(geng)(geng)新換代產(chan)品。 備(bei)(bei)品備(bei)(bei)件是(shi)標準的(de)(de)(de)O型圈。從上至下的(de)(de)(de)輸(shu)送方(fang)式(shi)(shi)(shi)(shi)能(neng)可靠(kao)地(di)處(chu)理夾帶液體(ti)的(de)(de)(de)濕氣(qi)及粉(fen)塵,并(bing)且無(wu)需(xu)過濾器。最優(you)化(hua)的(de)(de)(de)螺(luo)桿(gan)(gan)(gan)(gan)外形(xing)設(she)計使(shi)功率(lv)消(xiao)耗降(jiang)到(dao)最低(di)(di),簡單的(de)(de)(de)設(she)計可使(shi)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)腔在(zai)1小時(shi)內(nei)在(zai)現(xian)場全部(bu)解體(ti),易于(yu)清(qing)洗維護(hu)。 2、獨特(te)的(de)(de)(de)冷卻方(fang)式(shi)(shi)(shi)(shi) 很多(duo)泵(beng)(beng)(beng)(beng)(beng)(beng)(beng)(beng)轉子(zi)卡死的(de)(de)(de)原因是(shi)吸(xi)入含有粉(fen)塵及結(jie)晶的(de)(de)(de)物(wu)質、高(gao)溫(wen)發(fa)生聚合的(de)(de)(de)物(wu)質、熱敏(min)性物(wu)質的(de)(de)(de)升華(hua)造成(cheng)轉子(zi)間(jian)的(de)(de)(de)間(jian)...