2021
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01
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14
干(gan)式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)主要(yao)在(zai)半導體行業(ye)(ye)、化學(xue)工業(ye)(ye)、薄膜產(chan)業(ye)(ye)得到應(ying)用(yong)(yong)(yong)與發展。國外的(de)干(gan)泵(beng)(beng)(beng)(beng)(beng)市場正處(chu)于(yu)蒸蒸日(ri)上的(de)階(jie)段,如日(ri)本,半導體行業(ye)(ye)已全部用(yong)(yong)(yong)干(gan)式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)代(dai)替(ti)油封式(shi)(shi)(shi)機(ji)械泵(beng)(beng)(beng)(beng)(beng),而(er)歐(ou)美半導體行業(ye)(ye)45%以上用(yong)(yong)(yong)干(gan)式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)代(dai)替(ti)了油封式(shi)(shi)(shi)機(ji)械泵(beng)(beng)(beng)(beng)(beng),大大提(ti)高(gao)(gao)了產(chan)品的(de)性(xing)能和質量。 為了滿足不同應(ying)用(yong)(yong)(yong)領域和不同工況(kuang)的(de)要(yao)求,國外有(you)螺(luo)(luo)桿(gan)(gan)(gan)式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)、多級羅茨真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)、多級爪式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)、往復式(shi)(shi)(shi)活塞真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)、渦(wo)旋(xuan)式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)以及渦(wo)輪(lun)式(shi)(shi)(shi)無油真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)等。干(gan)泵(beng)(beng)(beng)(beng)(beng)極限壓力從10Pa~10-2Pa,抽速(su)從20m3/h~500m3/h。 1、干(gan)式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)的(de)介紹及原(yuan)理 此為立式(shi)(shi)(shi)雙螺(luo)(luo)桿(gan)(gan)(gan)干(gan)式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng),它的(de)吸(xi)氣(qi)(qi)和排氣(qi)(qi)原(yuan)理和大多數是(shi)一樣的(de),是(shi)利用(yong)(yong)(yong)一對(dui)螺(luo)(luo)桿(gan)(gan)(gan),在(zai)泵(beng)(beng)(beng)(beng)(beng)殼中作(zuo)同步高(gao)(gao)速(su)反向旋(xuan)轉(zhuan)(zhuan)而(er)產(chan)生的(de)吸(xi)氣(qi)(qi)和排氣(qi)(qi)作(zuo)用(yong)(yong)(yong)的(de)抽氣(qi)(qi)設備。 干(gan)式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)工作(zuo)時,相(xiang)互之間(jian)無摩擦,運轉(zhuan)(zhuan)平穩,噪音低(di),工作(zuo)腔(qiang)無需潤(run)滑油,因此,干(gan)式(shi)(shi)(shi)螺(luo)(luo)桿(gan)(gan)(gan)泵(beng)(beng)(beng)(beng)(beng)能抽除含有(you)大量水(shui)蒸汽及少量粉(fen)塵(chen)。由于(yu)螺(luo)(luo)桿(gan)(gan)(gan)制成變螺(luo)(luo)距結(jie)構(gou)(gou),與等螺(luo)(luo)距結(jie)構(gou)(gou)相(xiang)比,極限真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)更高(gao)(gao),而(er)消耗(hao)功率更低(di),具有(you)節能,免維(wei)修(xiu)等優(you)(you)點。它是(shi)油封式(shi)(shi)(shi)真(zhen)(zhen)(zhen)空(kong)(kong)(kong)(kong)泵(beng)(beng)(beng)(beng)(beng)的(de)更新換代(dai)產(chan)品。 備品備件是(shi)標準的(de)O型(xing)圈。從上至下的(de)輸送方(fang)式(shi)(shi)(shi)能可靠地處(chu)理夾帶液(ye)體的(de)濕氣(qi)(qi)及粉(fen)塵(chen),并(bing)且無需過濾器。最(zui)優(you)(you)化的(de)螺(luo)(luo)桿(gan)(gan)(gan)外形設計使功率消耗(hao)降到最(zui)低(di),簡單的(de)設計可使泵(beng)(beng)(beng)(beng)(beng)腔(qiang)在(zai)1小時內在(zai)現(xian)場全部解體,易于(yu)清洗維(wei)護。 2、獨特的(de)冷卻方(fang)式(shi)(shi)(shi) 很(hen)多泵(beng)(beng)(beng)(beng)(beng)轉(zhuan)(zhuan)子卡(ka)死(si)的(de)原(yuan)因是(shi)吸(xi)入含有(you)粉(fen)塵(chen)及結(jie)晶的(de)物(wu)質、高(gao)(gao)溫發生聚合(he)的(de)物(wu)質、熱敏性(xing)物(wu)質的(de)升華造成轉(zhuan)(zhuan)子間(jian)的(de)間(jian)...