一、超高真空插(cha)板閥(fa):
此閥(fa)(fa)門分為手(shou)(shou)動(dong)(dong)(dong)(dong)、氣動(dong)(dong)(dong)(dong)、電動(dong)(dong)(dong)(dong)三種(zhong)驅(qu)動(dong)(dong)(dong)(dong),在結構設計上合(he)理(li),在外形上美觀,并具有動(dong)(dong)(dong)(dong)作(zuo)平穩(wen)、體(ti)積小、使用可靠、密封性能好和壽命長等優點(dian),能廣泛應用于(yu)超高真(zhen)空設備中。閥(fa)(fa)門以手(shou)(shou)轉動(dong)(dong)(dong)(dong)手(shou)(shou)柄為動(dong)(dong)(dong)(dong)力,通(tong)過傳動(dong)(dong)(dong)(dong)桿推(拉)動(dong)(dong)(dong)(dong)連(lian)桿機構,帶(dai)著驅(qu)動(dong)(dong)(dong)(dong)體(ti)沿軸向運動(dong)(dong)(dong)(dong),驅(qu)動(dong)(dong)(dong)(dong)體(ti)通(tong)過擺桿或鋼珠(zhu)與閥(fa)(fa)板連(lian)接,完(wan)成閥(fa)(fa)板開啟(qi)及(ji)關閉動(dong)(dong)(dong)(dong)作(zuo)。閥(fa)(fa)門的介(jie)質為空氣及(ji)非腐蝕性氣體(ti)。
二(er)、超高真空插(cha)板閥(fa)特點
軸封有波紋管密封和氟橡膠密封兩種可選擇,其它密封件為氟橡膠,無潤滑劑設計;
閥體采用不銹鋼內部焊接,漏率小;
閥體采用加強筋結構,體積小、重量輕,外形美觀;
采用雙導軌軸承滾輪機構,運動平穩;閥板整體式結構,支撐力均勻。
三、超高真(zhen)空插板(ban)閥(fa)性能指(zhi)標
類型(xing): 插(閘)板閥?
驅動(dong)方式(shi): 手(shou)動(dong)、氣動(dong)、電動(dong)
閥體材料: 不銹鋼?
適用真空: 超高真空?
適用范圍:
1×10-5Pa~1.2×105Pa(全部氟膠圈密封)
1×10-6Pa~1.2×105Pa(波紋管(guan)密封)
閥(fa)(fa)體(ti)和(he)閥(fa)(fa)座漏率:1.3×10-7Pa·L·s-1
首次保養循環次數:100,000次
安裝位置:任意
打開時插板上的壓差:≤3×103Pa任意方向
閥體烘烤溫度:打開時≤200℃;關閉時≤150℃
超高真(zhen)空插板(ban)閥閥門位(wei)置指示:
手動(dong)驅動(dong):帶有啟閉位置(zhi)指示(機(ji)械(xie)式(shi))
氣動驅(qu)動:帶有啟閉位置指示開關(guan)(guan)(磁(ci)性開關(guan)(guan))
電動驅動:帶有啟閉位置指示開關(微動開關)